This accessible text is now fully revised and
updated, providing an overview of fabrication
technologies and materials needed to realize modern
microdevices. It demonstrates how common
microfabrication principles can be applied in different
applications, to create devices ranging from nanometer
probe tips to meter scale solar cells, and a host of
microelectronic, mechanical, optical and fluidic devices
in between. Latest developments in wafer engineering,
patterning, thin films, surface preparation and bonding
are covered. This second edition includes: expanded
sections on MEMS and microfluidics related fabrication
issues new chapters on polymer and glass
microprocessing, as well as serial processing techniques
200 completely new and 200 modified figures more
coverage of imprinting techniques, process integration
and economics of microfabrication 300 homework exercises
including conceptual thinking assignments, order of
magnitude estimates, standard calculations, and device
design and process analysis problems solutions to
homework problems on the complementary website, as well
as PDF slides of the figures and tables within the book
With clear sections separating basic principles from
more advanced material, this is a valuable textbook for
senior undergraduate and beginning graduate students
wanting to understand the fundamentals of
microfabrication. The book also serves as a handy desk
reference for practicing electrical engineers, materials
scientists, chemists and physicists alike.
www.wiley.com/go/Franssila—Micro2e
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